An RF Generator generates plasma, the key component in manufacturing and processing of semiconductor/LCD/solar cell.
The RF Generator delivers high-frequency wave of specified frequency and power level to the chamber.
RF Generator
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Introduction
Product Features
1. Various Frequency Band Design: 100kHz ~ 500MHz
2. High-level Power Delivery : Maximum of 50kW
3. Various Interface Support: A/D Interface, RS232C, Device net, Handy Controller (Remote Controller)
4. High-Speed Arc Cut function for safe processing ≤2usec
5. Various Protection Circuits: Automatically stops all functions in the event of over voltage, excess current, extreme temperatures, volumes, water leaks and cooling fan malfunctions
2. High-level Power Delivery : Maximum of 50kW
3. Various Interface Support: A/D Interface, RS232C, Device net, Handy Controller (Remote Controller)
4. High-Speed Arc Cut function for safe processing ≤2usec
5. Various Protection Circuits: Automatically stops all functions in the event of over voltage, excess current, extreme temperatures, volumes, water leaks and cooling fan malfunctions
| 50kW | O | O | ||||||||||||
| 30kW | O | O | ||||||||||||
| 20kW | O | O | O | |||||||||||
| 10kW | O | O | O | O | O | O | O | O | O | O | ||||
| 7.5kW | O | O | O | O | O | O | O | O | O | O | ||||
| 5kW | O | O | O | O | O | O | O | O | O | O | O | |||
| 3kW | O | O | O | O | O | O | O | O | O | O | O | O | ||
| 2kW | O | O | O | O | O | O | O | O | O | O | O | O | O | O |
| 1kW | O | O | O | O | O | O | O | O | O | O | O | O | O | O |
| 500W | O | O | O | O | O | O | O | O | O | O | O | O | O | O |
| 300W | O | O | O | O | O | O | O | O | O | O | O | O | O | O |
Watt
Hz |
100kHz | 250kHz | 400kHz | 800kHz | 2MHz | 4MHz | 13.56 MHz |
27.12 MHz |
40.68 MHz |
60MHz | 100MHz | 200MHz | 300MHz | 500MHz |
| MF | RF | |||||||||||||
Double/Triple RF Generator
A Generator that can generate 2~3 different frequencies from a single machine
