Introduction
Matcher is an automatic impedance-matching device.
To generate high-quality plasma using high-frequencies from RF Generators, it is essential to match the impedance between the source and the chamber(target).
This device automatically matches output impedance at 50Ω.
Product Features
1. A Line-up of Products with Various Conditions: 300W ~ 30kW, 100kHz ~ 500MHz
2.
High-Speed Impedance Matching: 0.5 seconds within the preset settings
3. Wide Impedance Matching Point:
4. Various Data Outputs and Digital Indications: Traveling Wave and Reflected Wave Electricity, Vpp, Vdc, Irf,
Matching Position
5.
Easy Operation: Has digital input system. (Preset, 0 Balance, Motor Speed, etc)
6.
Various Interfaces: RS232C, Handy Controller (Remote Controller)