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Matcher


Introduction
Matcher is an automatic impedance-matching device.

To generate high-quality plasma using high-frequencies from RF Generators, it is essential to match the impedance between the source and the chamber(target).

This device automatically matches output impedance at 50Ω.

Product Features
1. A Line-up of Products with Various Conditions: 300W ~ 30kW, 100kHz ~ 500MHz
2. High-Speed Impedance Matching: 0.5 seconds within the preset settings
3. Wide Impedance Matching Point:
4. Various Data Outputs and Digital Indications: Traveling Wave and Reflected Wave Electricity, Vpp, Vdc, Irf,
   Matching Position
5. Easy Operation: Has digital input system. (Preset, 0 Balance, Motor Speed, etc)
6. Various Interfaces: RS232C, Handy Controller (Remote Controller)

30kW           O O              
20kW           O O              
10kW O O O O O O O O O O        
7.5kW O O O O O O O O O O        
5kW O O O O O O O O O O O      
3kW O O O O O O O O O O O O    
2kW O O O O O O O O O O O O O O
1kW O O O O O O O O O O O O O O
500W O O O O O O O O O O O O O O
300W O O O O O O O O O O O O O O
Watt

Hz
100kHz 250kHz 400kHz 800kHz 2MHz 4MHz 13.56
MHz
27.12
MHz
40.68
MHz
60MHz 100MHz 200MHz 300MHz 500MHz
MF RF

Frequency : 2MHz 4MHz / 13.56MHz 4MHz 13.56MHz

Electricity : 1kW 2kW 5kW 10kW

Image Model Spec View
PTS-M1K13M Frequency : 13.56MHz
Output : 1kW
PTS-M10K13M4M Frequency : 4MHz / 13.56MHz
Output : 10kW
PTS-M2K4M Frequency : 4MHz
Output : 2kW
PTS-M10K2M Frequency : 2MHz
Output : 10kW
PTS-M5K4M Frequency : 4MHz
Output : 5kW