Phase Shifter
Phase Shifter is used for directing HF waves from multiple RF Generators to a single chamber.
Phase is controlled by comparative feedback of basic phase signals and load voltage phase.
Category | Image | Model | Spec | View |
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VIPP Sensor | VIPP Sensor | Frequency : 13.56MHz Output : |
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Noise Filter | PTS-NF13M | Frequency : 13.56MHz Output : |
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Pulse Generator | PTS-PG01 | Frequency : 500Hz ~ 10kHz Output : |